Abstract: The ternary cathode material combines the high specific capacity of LiNiO2, the good cycle performance of LiCoO2, the high safety and low cost of LiMnO2, and has become one of the most promising cathode materials for lithium-ion batteries. The microstructure of the cathode material is an important factor affecting battery performance. Scanning electron microscope (SEM) analysis is an important means to study the microstructure of battery materials. Secondary electron signals, backscattered electron signals and energy dispersive spectrum (EDS) analysis, electron back-scattered diffraction (EBSD) analysis, etc. can give the microstructure, composition, textural structure of battery materials. High-quality SEM and EBSD analysis requires the use of appropriate sample preparation methods to obtain a particle cross-section as flat as possible. In this experiment, ion beam processing technology was used to cut and polish the cross-section of the ternary cathode samples. The results show that the sample obtained by this method has good cross-section flatness and large observable area, which meets the research needs of observing and characterizing battery cathode materials under SEM