Abstract: Considering the specialization and diversity of Scanning Probe Microscopy (SPM) and the requirements of standardization, a three-dimensional framework of SPM standard system was constructed in line with the development of the field. Then, the relevant national standards and technical contents of SPM general foundation, key components/ products and application testing are studied. The current construction of SPM standardization and standard system is explained. Finally, under the current technical and industrial conditions, it is proposed that in order to achieve the goals of unified quantity value, interface compatibility, quality evaluation and comparability of results, it is appropriate to focus on the following three aspects, SPM performance metrics inspection standards, SPM imaging quality adjustment and evaluation method standards, and common SPM application standards or guidelines, so as to improve China's SPM standard system.