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SUN Beibei, YANG Yujie, BAI Yunfei, CUI Wenji, LIU Dehua, HAN Xiangguang, WANG Lu, TAN Renjie, WU Tao, ZHANG Zhilan, LI Boyang, YANG Ping, LU Dejiang, GAO Wendi, ZHAO Libo. Research Progress on MEMS High Precision Micro/ Nanonewton Force Sensors Technology[J]. Intelligent Perception Engineering, 2025, 2(1): 1-13.
Citation: SUN Beibei, YANG Yujie, BAI Yunfei, CUI Wenji, LIU Dehua, HAN Xiangguang, WANG Lu, TAN Renjie, WU Tao, ZHANG Zhilan, LI Boyang, YANG Ping, LU Dejiang, GAO Wendi, ZHAO Libo. Research Progress on MEMS High Precision Micro/ Nanonewton Force Sensors Technology[J]. Intelligent Perception Engineering, 2025, 2(1): 1-13.
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Research Progress on MEMS High Precision Micro/ Nanonewton Force Sensors Technology

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    • Abstract
  • Micro / nanonewton force sensing technology plays an important role in the field of micro / nano materials and biological cells mechanical measurement and force control micro / nano-manipulation. The force sensors based on Micro-Electro-Mechanical Systems (MEMS) have the advantages of miniaturization, high sensitivity, low cost and convenient mass manufacturing, which has become the mainstream technology of microscale mechanical sensing. Based on this, the paper summarizes the current research progress of MEMS high precision force sensors technology from the aspects of sensing principle, material synthesis, sensitive structure design and signal processing. The performance characteristics of MEMS high precision force sensors are analyzed. The challenges in performance improvement, miniaturization and integration of MEMS high precision force sensors are discussed. The future development trend of MEMS high precision force sensors is prospected.
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