Abstract: In order to improve the robust performance of the permanent magnet synchronous linear motor position control system, an integral backstepping controller based on the feedback linearization transformation decoupling system is designed. Firstly, the new intermediate state variables are defined, and the permanent magnet synchronous linear motor system is linearized and decoupled into a series integral system with nonlinear disturbance state through state feedback, so as to avoid the disturbance state of unknown coefficients during conventional feedback decoupling irreparable problem. Secondly, the backstepping controller is designed according to the Lyapunov stability condition, and the integral link is added to the design of the intermediate virtual control quantities of the subsystems at all levels to improve the control accuracy of the system. And the stable condition is used to design the disturbance adaptive law, the system disturbance is estimated and compensated, the robust performance of the permanent magnet synchronous linear motor control system is improved. Finally, an experimental platform based on the semi-physical control system is built, and the correctness and effectiveness of the proposed method are verified by experiments.