Abstract:
As a key sensitive device, the magnetic field sensors play an important role in the field of modern industry and electronic information. The research progress of new sensitive materials in the design of magnetic field sensors, with special attention to the characteristics of sensitive materials of various magnetic field sensors and their applications in weak magnetic field detection. Firstly, the sensitive materials and their properties based on anisotropic magnetoresistance (AMR), giant magnetoresistance (GMR), tunnel magnetoresistance (TMR) and Hall elements are summarized in this paper. Then, the sensitive materials and advantages of new high-precision sensors such as diamond NV color center, superconducting quantum interference device (SQUID) and spin-exchange relaxation free (SERF) atom magnetometer are discussed. Finally, the innovation of sensitive materials and the application of magnetic field sensors in micro-electromechanical systems (MEMS) and micro-opto-electromechanical systems (MOEMS) are analyzed, and the future development trend and application prospect of magnetic field sensors in the direction of sensitive materials and components are prospected.