新型敏感材料在磁场传感器中的应用研究综述

Review on the Application of New Sensitive Materials for Magnetic Field Sensors

  • 摘要: 磁场传感器作为关键的敏感器件,在现代工业和电子信息领域具有重要作用。综述新型敏感材料在磁场传感器中的应用研究进展,特别是各类磁场传感器的敏感材料特性及其在微弱磁场探测中的应用。首先,概述基于各向异性磁阻(Anisotropic Magnetoresistance,AMR)、巨磁阻(Giant Magnetoresistance,GMR)、隧道磁阻(Tunnel Magnetoresistance,TMR)和霍尔元件等传统磁场传感器的敏感材料及其性能;其次,探讨基于金刚石NV色心、超导量子干涉装置(Superconducting Quantum Interference Device,SQUID)和自旋交换无弛豫(Spin-Exchange Relaxation Free,SERF)等新型高精度传感器的敏感材料及其优势;最后,分析微机电系统(Micro-Electro-Mechanical Systems,MEMS)和微光机电系统(Micro-Opto-Electro-Mechanical Systems,MOEMS)磁场传感器的敏感材料创新及其在智能感知领域的应用,并对新型磁场传感器的未来发展趋势和应用前景进行展望。

     

    Abstract: As a key sensitive device, the magnetic field sensors play an important role in the field of modern industry and electronic information. The research progress of new sensitive materials in the design of magnetic field sensors, with special attention to the characteristics of sensitive materials of various magnetic field sensors and their applications in weak magnetic field detection. Firstly, the sensitive materials and their properties based on anisotropic magnetoresistance (AMR), giant magnetoresistance (GMR), tunnel magnetoresistance (TMR) and Hall elements are summarized in this paper. Then, the sensitive materials and advantages of new high-precision sensors such as diamond NV color center, superconducting quantum interference device (SQUID) and spin-exchange relaxation free (SERF) atom magnetometer are discussed. Finally, the innovation of sensitive materials and the application of magnetic field sensors in micro-electromechanical systems (MEMS) and micro-opto-electromechanical systems (MOEMS) are analyzed, and the future development trend and application prospect of magnetic field sensors in the direction of sensitive materials and components are prospected.

     

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